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Effect of Annealing Treatment on the Optical Properties of Zinc Oxide (ZnO) thin film prepared by MOCVD

Iis Nurhasanah, Priyono and Wilson W.Wenas

Data & Software Engineering Research Group
STEI-ITB, Jl. Ganeca No.10, Bandung 40132, Indonesia


The annealing treatment of ZnO thin film at various temperatures was performed. The effect of this treatment on the optical properties of ZnO thin film were investigated in order to apply this film to optoelectronic devices. The optical transmittance spectra  were measured and it was found that the transmittance in UV-VIS region decreased with annealing temperature . The loss of light is mainly due to  the increase of carrier density, resulting from increased oxygen vacancies during the annealing process at 300C. It was also found that the absorption edge shifted to lower energy when the film was annealed at 300C in air.

Keywords: annealing, optical properties, transmittance spectra, ZnO

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