Effect of B-doping on the Crystal Structural and Optical Properties of Zinc Oxide thin films for photonic devices

Fery Adriyanto, Usman Santosa, Riyatun, and Wilson W. Wenas

Data & Software Engineering Research Group
STEI-ITB, Jl. Ganeca No.10, Bandung 40132, Indonesia

Effect of B-doping B₂H₆ on the crystal structural and optical properties of zinc oxide (ZnO) thin films has been studied. The crystal orientation of these films were evaluated  by X-ray diffraction. It was found that the (110) reflection peak was dominant for all the film and became less pronounced as B2H6 flow rate was increased. The grain size of thin film decreased as B₂H₆ flow rate was increased. The transmittance in the ultraviolet  wavelengths region shifted to higher energy as the B₂H₆ flow rate was increased. I t was also found that refractive index of ZnO thin films increased as the B₂H₆ flow rate was further increased. These doping effects should be minimized  in order to grow low resistivity ZnO film with excellent optical properties for application to photonic devices.

Download Article