DOI Number : 10.5614/itbj.sci.2008.40.2.6
Hits : 6

Catalytic Carbon Submicron Fabrication Using Home-Built Very-High Frequency Plasma Enhanced Chemical Vapour Deposition

Sukirno1, Satria Zulkarnaen Bisri1,2, Rasih Yulia Sari1, Lilik Hasanah1,3, Mursal1,4, Ida Usman1,5 & Darsikin1,6

1Laboratory for Electronic Material Physics, Faculty of Mathematics and Natural Sciences, Institut Teknologi Bandung, Bandung 40132, Indonesia

2Institute for Material Research, University of Tohoku, Japan

3Department of Physics, Universitas Pendidikan Indonesia, Bandung 40154, Indonesia

4Department of Physics, Universitas Syiah Kuala, Banda Aceh, Indonesia

5Department of Physics, Universitas Haluoleo, Palu, Indonesia

6Department of Physics, Universitas Tadulako, Kendari, Indonesia

Contact e-mail:

Abstract. In this research, carbon nanotubes (CNT) fabrication is attempted by using existing home-made Plasma Enhanced Chemical Vapour Deposition (PECVD) system. The fabrication is a catalytic growth process, which Fe catalyst thin film is grown on the Silicon substrate by using dc-Unbalanced Magnetron Sputtering method. By using methane (CH4) as the source of carbon and diluted silane (SiH4) in hydrogen as the source of hydrogen with 10:1 ratio, CNT fabrications have been attempted by using Very High Frequency PECVD (VHF-PECVD) method. The fabrication processes are done at relatively low temperature, 250oC, but with higher operated plasma frequency, 70 MHz. Recently, it is also been attempted a fabrication process with only single gas source, but using one of the modification of the VHF-PECVD system, which is by adding hot-wire component. The attempt was done in higher growth temperature, 400oC. Morphological characterizations, by using Scanning Electron Micrograph (SEM) and Scanning Probe Microscopy (SPM), as well as the composition characterization, by using Energy Dispersion Analysis by X-Ray (EDAX), show convincing results that there are some signatures of CNT present.

Keywords: 250oC; 70 MHz; dc Unbalanaced Magnetron Sputtering; fabrication of CNT by VHF PECVD

Download Article
Bahasa Indonesia | English


Begin on 10 October 2014 this website is no longer activated for article process in Journal of Mathematical and Fundamental Sciences, Journal of Engineering and Technological Sciences, Journal of ICT Research and Applications and Journal of Visual Art and Design. The next process will be proceeded under new website at

For detail information please contact us to:

       ITB Journal Visitor Number #10140140       
       Jl. Tamansari 64, Bandung 40116, Indonesia Visitor IP Address #       
       Tel : +62-22-250 1759 ext. 121 2011 Institut Teknologi Bandung       
       Fax : +62-22-250 4010, +62-22-251 1215 XHTML + CSS + RSS       
       E-mail : or Developed by AVE